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Elastic electron backscattering from silicon surfaces: effect of charge-carrier concentration
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SYSNO ASEP 0104231 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title Elastic electron backscattering from silicon surfaces: effect of charge-carrier concentration Title Pružný odraz elektronů od povrchu křemíku: vliv koncentrace nosičů náboje Author(s) Zemek, Josef (FZU-D) RID, ORCID
Jiříček, Petr (FZU-D) RID, ORCID, SAI
Lesiak, B. (PL)
Jablonski, A. (PL)Source Title Surface and Interface Analysis. - : Wiley - ISSN 0142-2421
Roč. 36, - (2004), s. 809-811Number of pages 3 s. Language eng - English Country GB - United Kingdom Keywords elastic peak electron spectroscopy(EPES) ; inelastic mean free path(IMFP) ; elastic electron backscattering probability ; charge-carrier concentrations ; silicon Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects GA202/02/0237 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z1010914 - FZU-D Annotation Silicon wafers, p- and n-doped with different free-carrier charge concentrations, were selected as model materials to study a possible influence of charge-carrier concentrations (or electrical conductivity) on measured elastic electron backscattering probabilities and electron inelastic mean free paths determined by elastic peak electron spectroscopy Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2005
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