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Elastic electron backscattering from silicon surfaces: effect of charge-carrier concentration

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    SYSNO ASEP0104231
    Document TypeJ - Journal Article
    R&D Document TypeJournal Article
    Subsidiary JOstatní články
    TitleElastic electron backscattering from silicon surfaces: effect of charge-carrier concentration
    TitlePružný odraz elektronů od povrchu křemíku: vliv koncentrace nosičů náboje
    Author(s) Zemek, Josef (FZU-D) RID, ORCID
    Jiříček, Petr (FZU-D) RID, ORCID, SAI
    Lesiak, B. (PL)
    Jablonski, A. (PL)
    Source TitleSurface and Interface Analysis. - : Wiley - ISSN 0142-2421
    Roč. 36, - (2004), s. 809-811
    Number of pages3 s.
    Languageeng - English
    CountryGB - United Kingdom
    Keywordselastic peak electron spectroscopy(EPES) ; inelastic mean free path(IMFP) ; elastic electron backscattering probability ; charge-carrier concentrations ; silicon
    Subject RIVBM - Solid Matter Physics ; Magnetism
    R&D ProjectsGA202/02/0237 GA ČR - Czech Science Foundation (CSF)
    CEZAV0Z1010914 - FZU-D
    AnnotationSilicon wafers, p- and n-doped with different free-carrier charge concentrations, were selected as model materials to study a possible influence of charge-carrier concentrations (or electrical conductivity) on measured elastic electron backscattering probabilities and electron inelastic mean free paths determined by elastic peak electron spectroscopy
    WorkplaceInstitute of Physics
    ContactKristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
    Year of Publishing2005

Number of the records: 1  

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