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Micromaching of organic polymers by direct photo-etching using a laser plasma X-ray source
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SYSNO ASEP 0100716 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title Micromaching of organic polymers by direct photo-etching using a laser plasma X-ray source Title Mikrostrukturování povrchu organických polymerů přímým fotoleptáním s využitím laserového plazmatu jako rtg zdroje Author(s) Fiedorowicz, H. (PL)
Bartnik, A. (PL)
Bittner, Michal (FZU-D)
Juha, Libor (FZU-D) RID, ORCID, SAI
Krása, Josef (FZU-D) RID, ORCID
Kubát, Pavel (UFCH-W) RID, ORCID, SAI
Mikolajczyk, J. (PL)
Rakowski, R. (PL)Source Title Microelectronic Engineering. - : Elsevier - ISSN 0167-9317
73-74, - (2004), s. 336-339Number of pages 4 s. Language eng - English Country NL - Netherlands Keywords microstructures ; photo-etching ; X-rays Subject RIV BH - Optics, Masers, Lasers R&D Projects KSK2043105 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) Annotation The first experiments on direct photo-etching of organic polymers using a laser plasma X-ray source based on a laser-irradiated gas puff target are presented. The results show relatively high efficiency of X-ray direct photo-etching that could be used for micromaching of organic polymers Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2005
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