Fiedorowicz, H. - Bartnik, A. - Bittner, Michal - Juha, Libor - Krása, Josef - Kubát, Pavel - Mikolajczyk, J. - Rakowski, R.
Micromaching of organic polymers by direct photo-etching using a laser plasma X-ray source.
Microelectronic Engineering. 73-74, - (2004), s. 336-339. ISSN 0167-9317. E-ISSN 1873-5568
R&D Projects: GA AV ČR KSK2043105
Impact factor: 1.514, year: 2004
http://hdl.handle.net/11104/0008209