Number of the records: 1
Plasma Polymers and Related Materials
- 1.
SYSNO 0032087 Title Treatment of Organosilicon Thin Films by Exposure to Different O2 Based Plasma and Afterglow Conditions Title Plazmové leptání organokřemíkových tenkých vrstev modifikovaných za různých podmínek aktivního a rozpadajícího se plazmatu Author(s) Supiot, P. (FR)
Macková, Anna (UJF-V) RID, ORCID, SAI
Vivien, C. (FR)
Granier, A. (FR)
Bousquet, CH. (FR)
Boufayed, F. (FR)
Escaich, D. (FR)
Raynoad, P. (FR)
Strýhal, Z. (CZ)
Pavlík, Josef (ENTU-I)Source Title Plasma Polymers and Related Materials, Thin Films by Exposure to Different O2 Based Plasma and Afterglow Conditions. s. 53-58. - Ankara : Hacettepe University Press, 2005 ISBN 975-491-194-0 Document Type Část monografie, knihy (kapitola) Grant OC 527.100 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) 1P05OC014 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) CEZ AV0Z10480505 - UJF-V (2005-2011) Language eng Country TR Keywords organosilicon * PACVD * PECVD * RBS analysis Permanent Link http://hdl.handle.net/11104/0132691
Number of the records: 1