Number of the records: 1
What can we see at very low energies in the Scanning Electron Microscope?
- 1.
SYSNO ASEP 0022405 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title What can we see at very low energies in the Scanning Electron Microscope? Title Co můžeme vidět v rastrovacím elektronovém mikroskopu na velmi nízkých energiích? Author(s) Müllerová, Ilona (UPT-D) RID, SAI, ORCID Source Title Proceedings - Microscopy Conference 2005 - Dreiländertagung /6./. - Villigen : Paul Scherrer Institute, 2005 - ISSN 1019-6447 - ISBN N Pages s. 51 Number of pages 1 s. Action Dreiländertagung Microscopy Conference (MC 2005) Event date 28.08.2005-02.09.2005 VEvent location Davos Country CH - Switzerland Event type WRD Language eng - English Country CH - Switzerland Keywords low energy electrons ; detection system ; scanning elektron microscope Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects GA102/05/2327 GA ČR - Czech Science Foundation (CSF) Annotation The Scanning Electron Microscope (SEM) is a widely used instrument, which is normally optimised to primary beam energy of about 15 keV, in contrast to the Low Energy Electron Microscope (LEEM) operated below 50 eV. There are great differences between these instruments, both in their illumination and detection parts. Nevertheless, contrast types can be expected in SEM similar to those observed in LEEM when the cathode lens (CL) principle, inherent to LEEM, is incorporated into the SEM. To detect all emitted electrons, auxiliary fields have to be used to divert the signal beam (accelerated to nearly the same energy as the primary electrons) from the optical axis. In our simple detection system the anode of the CL is formed by a YAG crystal with a tiny central opening, so that the slowest signal electrons can escape through the bore, but a small specimen tilt can secure acquisition even of specularly reflected slowest electrons. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2006
Number of the records: 1