Magnetic-field-induced Actuation of Ni-Mn-Ga Micropillars

0496232 - FZÚ 2019 RIV DE eng C - Conference Paper (international conference)
Musiienko, D. - Saren, A. - Sozinov, A. - Ullakko, K. - Straka, Ladislav - Klimša, Ladislav - Heczko, Oleg
Magnetic-field-induced Actuation of Ni-Mn-Ga Micropillars.
Proceedings International Conference on New Actuators /16./. Bremen: VDE VERLAG, 2018 - (Borgmann, H.), s. 1-642. ISBN 978-3933339300.
[ACTUATOR 2018 - International Conference on New Actuators /16./. Bremen (DE), 25.06.2018-27.06.2018]
Institutional support: RVO:68378271
Keywords : Ferromagnetic shape * MEMS * Micro-magneto-mechanical systems
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)

We report on magnetic-field-induced actuation of Ni50Mn28.5Ga21.5 single crystalline micropillars. Focused ion beam (FIB) milling technology was used to machine 45x45x120 micrometer3 cuboid pillars. The removal of about 2 µm of ion-beam-damaged surface layer enabled magnetic field actuation in pillars. Our results demonstrate the feasibility of manufacturing of microns-sized magnetic shape memory actuators by using Xe plasma source FIB technique.

Permanent Link: http://hdl.handle.net/11104/0289184