Material properties of lithium fluoride for predicting XUV laser ablation rate and threshold fluence

0487382 - ÚFCH JH 2018 RIV CZ eng C - Conference Paper (international conference)
Blejchař, T. - Nevrlý, V. - Vašinek, M. - Dostál, Michal - Pečínka, L. - Dlabka, J. - Stachoň, M. - Juha, Libor - Bitala, P. - Zelinger, Zdeněk - Pira, P. - Wild, J.
Material properties of lithium fluoride for predicting XUV laser ablation rate and threshold fluence.
Proceedings of SPIE. In: DAMAGE TO VUV, EUV, AND X-RAY OPTICS V. Proceedings of SPIE. Prague: SPIE, 2015, č. článku 95110K. ISBN 978-1-62841-632-9.
[Conference on Damage to VUV, EUV, and X-Ray Optics V. Prague (CZ), 15.04.2015-16.04.2015]
R&D Projects: GA ČR(CZ) GAP108/11/1312
Institutional support: RVO:61388955 ; RVO:68378271
Keywords : ablation curve * threshold fluence * lithium fluoride * thermomechanic model * quasi-random sampling
OECD category: Physical chemistry; Fluids and plasma physics (including surface physics) (FZU-D)

This paper deals with prediction of extreme ultraviolet (XUV) laser ablation of lithium fluoride at nanosecond timescales. Material properties of lithium fluoride were determined based on bibliographic survey. These data are necessary for theoretical estimation of surface removal rate in relevance to XUV laser desorption/ablation process. Parameters of XUV radiation pulses generated by the Prague capillary-discharge laser (CDL) desktop system were assumed in this context. Prediction of ablation curve and threshold laser fluence for lithium fluoride was performed employing XUV-ABLATOR code. Quasi-random sampling approach was used for evaluating its predictive capabilities in the means of variance and stability of model outputs in expected range of uncertainties. These results were compared to experimental data observed previously.
Permanent Link: http://hdl.handle.net/11104/0282044