The hydrogen plasma doping of nanocrystalline ZnO thin flms

0483629 - FZÚ 2018 RIV FR eng A - Abstract
Chang, Yu-Ying - Remeš, Zdeněk - Stuchlík, Jiří
The hydrogen plasma doping of nanocrystalline ZnO thin flms.
E-MRS 2017 Spring Meeting and Exhibit. Strasbourg: European Materials Research Society, 2017.
[E-MRS 2017 Spring Meeting and Exhibit. 22.05.2017-26.05.2017, Strasbourg]
R&D Projects: GA ČR GC16-10429J
Grant - others:AV ČR(CZ) KONNECT-007
Program: Bilaterální spolupráce
Institutional support: RVO:68378271
Keywords : ZnO * magnetron sputtering * hydrogen * doping
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)

We study the effect on the optical and electrical properties of hydrogen plasma treatment of the nominally undoped, nanocrystalline ZnO thin films deposited by DC reactive magnetron sputtering of Zn target in the gas mixture of argon and oxygen plasma. After hydrogen plasma treatment, the increase of the electrical conductivity and the increase of the infrared optical absorption was detected and related to the increase of the free carrier concentration. To confirm this relation, the mobility and carrier concentration were measured by temperature dependent electrical resistivity and Hall effect using the van der Pauw method. We also investigated the localized defect states below the optical absorption edge using optical absorption spectroscopy and photoluminescence in a broad spectral range from near UV to near IR. We conclude that the increase of the electrical conductivity is indeed confirmed to be related to the increase of the free carrier concentration.
Permanent Link: http://hdl.handle.net/11104/0278846