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Diamond coated LW-SAW sensors-study of diamond thickness effect

  1. 1.
    0480308 - FZÚ 2018 RIV CH eng C - Conference Paper (international conference)
    Drbohlavová, Lucie - Gerbedoen, J.C. - Taylor, Andrew - Talbi, A. - Fekete, Ladislav - Ashcheulov, Petr - Soltani, A. - Bovtun, Viktor - Kempa, Martin - Bartoň, Jan - Cígler, Petr - Mortet, Vincent
    Diamond coated LW-SAW sensors-study of diamond thickness effect.
    Proceedings (Basel, Switzerland). Vol. 1. Basel: MDPI, 2017, s. 1-4, č. článku 540. E-ISSN 2504-3900.
    [Eurosensors 2017. Paris (FR), 03.09.2017-06.09.2017]
    R&D Projects: GA MPO FV10312; GA AV ČR(CZ) Fellowship J. E. Purkyně
    Grant - others:AV ČR(CZ) Fellowship J. E. Purkyně
    Program: Fellowship J. E. Purkyně
    Institutional support: RVO:68378271 ; RVO:61388963
    Keywords : love waves * acoustic sensors * CVD diamond * sensing in liquids
    OECD category: Condensed matter physics (including formerly solid state physics, supercond.)

    This study focuses on the fabrication and characterization of Love wave surface acoustic wave (LW-SAW) sensors with a thin nano-crystalline diamond (NCD) coating with an integrated microfluidics system. The effect of diamond layer thickness on the acoustic wave phase velocity and the sensor’s sensitivity have been investigated experimentally and compared with theoretical simulations. The fabricated sensors have been tested with a several liquids using a home-made microfluidics system.

    Permanent Link: http://hdl.handle.net/11104/0276124

     
     
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