The structure of Mg or Ca silicides and Ge nanoparticles on the surface of a-Si:H thin film

0480295 - FZÚ 2018 RIV VN eng A - Abstract
Stuchlík, Jiří - Tien, P.M. - Stuchlíková, The-Ha - Píč, Vlastimil - Čermák, Jan - Ledinský, Martin - Kupčík, Jaroslav - Fajgar, Radek - Remeš, Zdeněk - Shklyaev, A.A. - Volodin, V.A.
The structure of Mg or Ca silicides and Ge nanoparticles on the surface of a-Si:H thin film.
International conference on photonics and applications. Abstracts and programs /9./ (ICPA-9). Ninh Binh City: Vietnam Academy of Science and Technology, 2016 - (Vu, T.)
[The 9th International Conference on Photonics and Applications. 06.11.2016-10.11.2016, Ninh Binh City]
R&D Projects: GA MŠMT LM2015087
Grant - others:AV ČR(CZ) KONNECT-007
Program: Bilaterální spolupráce
Institutional support: RVO:68378271 ; RVO:67985858
Keywords : Si:H thin film * self-forming * nanoparticles
OECD category: Condensed matter physics (including formerly solid state physics, supercond.); Physical chemistry (UCHP-M)

The aim of our work is to reveal the mechanism of different semiconductor nanoparticles (NPs) forming on the surface of the Hydrogenated Silicon (Si:H) thin films. Glass and glass covered by Indium Tin Oxide (ITO) were used as substrates for the thin Amorphous layer (a-Si:H) deposited by the Plasma Enhanced Chemical Vapour Deposition (PECVD). The self-forming of silicides NPs was expected during evaporation of Magnesium and Calcium on the heated a-Si:H surface. Germanium we deposited by Molecular Beam Epitaxy (MBE). The NPs self - forming was investigated by Scanning Electron Microscope (SEM), High Resolution Transmission Electron Microscope (HRTEM), Atomic Force Microscope (AFM) and Raman spectroscopy
Permanent Link: http://hdl.handle.net/11104/0276119