Structure and properties of DLC layers for industrial applications

0479995 - FZÚ 2018 RIV CZ eng C - Conference Paper (international conference)
Mates, Tomáš - Ledinský, Martin - Vetushka, Aliaksi - Pikna, Peter - Fejfar, Antonín - Marek, A. - Vyskočil, J. - Erichsen, J. - Dawah, P.
Structure and properties of DLC layers for industrial applications.
NANOCON 2016 - Conference Proceedings, 8th International Conference on Nanomaterials. Brno: TANGER Ltd., 2017, s. 214-219. ISBN 978-808729471-0.
[NANOCON 2016. International Conference on Nanomaterials - Research and Application /8./. Brno (CZ), 19.10.2016-21.10.2016]
R&D Projects: GA MŠMT LM2015087
Institutional support: RVO:68378271
Keywords : DLC * PACVD * AFM * SEM * Raman
OECD category: Coating and films
https://www.nanocon.eu/cz/sbornik-nanocon-2016/

Diamond-like carbon (DLC) layers based on amorphous carbon are used for wide range of applications, mostly for mechanical protection of various industrial components. We examined DLC layers at micro- and nanoscale by two independent microscopic techniques: Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM) with a good agreement. We compared DLC layers grown on steel substrate and Si wafer and found similarly structured clusters and a certain difference in the density of nucleation centres. The measurements of local mechanical properties by the AFM tip revealed that the Si wafer behaves as softer material compared to the growing DLC nanoclusters that also exhibit lower values in the map of the relative local friction coefficient. Finally, we observed changes in the Raman spectra of the DLC exposed to annealing at ambient conditions and found a gradual shift from the diamond phase to the graphite phase as a function of increasing temperature.
Permanent Link: http://hdl.handle.net/11104/0276009