Fast white-light interferometry with Hilbert transform evaluation

0478762 - FZÚ 2018 RIV US eng C - Conference Paper (international conference)
Pavlíček, Pavel - Mikeska, Erik
Fast white-light interferometry with Hilbert transform evaluation.
20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics. Bellingham: SPIE, 2016 - (Mullerová, J.; Senderáková, D.; Ladányi, L.; Scholtz, L.), s. 1-7, č. článku 101420Y. Proceedings of SPIE, 10142. ISBN 978-1-5106-0733-0. ISSN 0277-786X.
[20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics (SCPOC). Jasna (SK), 05.09.2016-09.09.2016]
R&D Projects: GA ČR GA13-12301S
Institutional support: RVO:68378271
Keywords : white-light interferometry * Hilbert transform * undersampling
OECD category: Electrical and electronic engineering

White-light interferometry is an established method for the measurement of the shape of objects. Unlike to the classical interferometry, white-light interferometry can measure the shape of objects with rough surface. A major disadvantage of white-light interferometry is the low scanning speed and thus the long measurement time. This disadvantage can be overcome by a strong undersampling and Hilbert transform evaluation. We propose a system that measures the shape of objects with rough surface with the scanning speed of more than 100 mu m/s with the standard frame rate of 25 fps. The measurement uncertainty is comparable with that obtained with standard design.
Permanent Link: http://hdl.handle.net/11104/0274821