Sputtered nanostructured interfaces used for biochemical sensing

0546599 - FZÚ 2022 RIV US eng C - Conference Paper (international conference)
Tvarožek, V. - Szabó, Ondrej
Sputtered nanostructured interfaces used for biochemical sensing.
Proceedings of Microelectronics (MIEL 2021). Danvers: IEEE, 2021, s. 189-192. ISBN 978-1-6654-4526-9.
[International Conference On Microelectronics (MIEL 2021) /32./. Niš (RS), 12.09.2021-14.09.2021]
R&D Projects: GA MŠMT(CZ) EF16_019/0000760
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : localized surface plasmon resonance * non-continuous island like Au films * electrochemical impedance spectroscopy
OECD category: Optics (including laser optics and quantum optics)

In this paper we demonstrate the forming of sensoric nanostructures by sputtering without using masking and lithography.A specific sequential (cyclic) sputtering technology for preparation of non-continuous island like Au films (nanoisland arrays) was developed. Applications of nanoisland arrays are presented in the Localized Surface Plasmon Resonance sensing and together with interdigitated array of electrodes in the Electrochemical Impedance Spectroscopy sensing.
Permanent Link: http://hdl.handle.net/11104/0323057