Optical emission spectroscopy of radio frequency inductively coupled plasma for cold hydrogenation of nanoparticles

0541826 - FZÚ 2022 RIV GB eng C - Conference Paper (international conference)
Remeš, Zdeněk - Kromka, Alexander - Míčová, J. - Rezek, B. - Poruba, A. - Hsu, H.S.
Optical emission spectroscopy of radio frequency inductively coupled plasma for cold hydrogenation of nanoparticles.
IOP Conference Series: Materials Science and Engineering. Vol. 1050. Bristol: IOP Publishing Ltd, 2021 - (Kozisek, Z.; Behulova, Z.; Potucek, Z.), č. článku 012012. ISSN 1757-8981.
[Joint Seminar on Development of Materials Science in Research and Education /30./ DMSRE 2020. Pavlov (CZ), 07.09.2020-11.09.2020]
R&D Projects: GA MŠMT(CZ) EF16_019/0000760; GA ČR GC19-02858J
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : OES * ICP * ZnO * nanoparticles
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)

Radio frequency (rf) inductively coupled plasma (ICP) offers an alternative, “cold” way to effect the size, composition, structure and surface functionality of nanoparticles (NPs), such as metal oxide NPs, providing further adjustment of their physical and chemical properties. The ICP was monitored in-situ by optical emission spectroscopy (OES). In particular, hydrogen oxygen, argon and nitrogen plasma was studied. OES data show that despite the decrease of the OE intensity with increasing gas pressure, the concentration of atomic hydrogen increases with pressure and rf power.

Permanent Link: http://hdl.handle.net/11104/0319345