Number of the records: 1
Automated inspection of PMMA coating on non-patterned silicon wafers
- 1.0511777 - ÚPT 2020 eng A - Abstract
Knápek, Alexandr - Drozd, Michal - Matějka, Milan - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír
Automated inspection of PMMA coating on non-patterned silicon wafers.
11th International Conference on Instrumental Methods of Analysis: Modern Trends and Applications, IMA-2019. Book of abstracts. -: -, 2019. s. 162.
[International Conference on Instrumental Methods of Analysis: Modern Trends and Applications /11./. 22.09.2019-25.09.2019, Ioannina]
R&D Projects: GA MPO FV10618
Institutional support: RVO:68081731
Keywords : dielectric surface inspection * resist coated wafer
OECD category: Nano-processes (applications on nano-scale)
Permanent Link: http://hdl.handle.net/11104/0302052
Number of the records: 1