In lens BSE detector with energy filtering

0491708 - ÚPT 2019 RIV NL eng J - Journal Article
Radlička, Tomáš - Unčovský, M. - Oral, Martin
In lens BSE detector with energy filtering.
Ultramicroscopy. Roč. 189, JUN (2018), s. 102-108. ISSN 0304-3991. E-ISSN 1879-2723
R&D Projects: GA TA ČR(CZ) TE01020118; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : electron optics * scanning electron microscopy * back scattered electrons * energy filtering
OECD category: Electrical and electronic engineering
Impact factor: 2.644, year: 2018

We present a new type of an in-lens detector designed for Thermo Fisher Scientific (FEI) electron microscopes with the Elstar column. A key feature of it is high-pass energy filtering to enable the detection of low-loss backscattered electrons with their energy close to the primary beam energy. We show an application of the detector in imaging of a biological sample where the signal from these electrons leads to a significant improvement in resolution.
Permanent Link: http://hdl.handle.net/11104/0285349