Diamond-like carbon prepared by pulsed laser deposition with ion bombardment: physical properties

0490103 - FZÚ 2019 RIV DE eng J - Journal Article
Písařík, Petr - Mikšovský, Jan - Remsa, Jan - Zemek, Josef - Tolde, Z. - Jelínek, Miroslav
Diamond-like carbon prepared by pulsed laser deposition with ion bombardment: physical properties.
Applied Physics A - Materials Science & Processing. Roč. 124, č. 1 (2018), s. 1-9, č. článku 85. ISSN 0947-8396. E-ISSN 1432-0630
R&D Projects: GA MŠMT(CZ) LO1409; GA ČR(CZ) GA15-05864S
Institutional support: RVO:68378271
Keywords : diamond-like carbon * thin layers * PLD * ion bombardment
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Impact factor: 1.784, year: 2018
Method of publishing: Limited access
https://doi.org/10.1007/s00339-017-1501-5

Diamond-like carbon (DLC) and titanium-doped DLC thin films were prepared by unique hybrid system consisting of pulsed laser deposition, ion source (bombardment) and magnetron sputtering. The influence of deposition parameters (ion energies, deposition pressures and magnetron power) on composition and physical properties was studied. Composition and sp(3)/sp(2) ratio were determined by XPS. sp(3)/sp(2) ratio was in the range from 1.4 to 2.2 for undoped DLC and from 3.4 to 4.8 for Ti-DLC. AFM showed that the layers were smooth, but with small amounts of random droplets. The measurements of the contact angle and determination of surface free energy were made for water, diiodomethane and ethylene glycol.
Permanent Link: http://hdl.handle.net/11104/0284395