A micro-scale hot wire anemometer based on low stress (Ni/W) multi-layers deposited on nano-crystalline diamond for air flow sensing

0486440 - FZÚ 2018 RIV GB eng J - Journal Article
Talbi, A. - Gimeno, L. - Gerbedoen, J.-C. - Viard, R. - Soltani, A. - Mortet, Vincent - Preobrazhensky, V. - Merlen, A. - Pernod, P.
A micro-scale hot wire anemometer based on low stress (Ni/W) multi-layers deposited on nano-crystalline diamond for air flow sensing.
Journal of Micromechanics and Microengineering. Roč. 25, č. 2 (2015), s. 1-8, č. článku 125029. ISSN 0960-1317. E-ISSN 1361-6439
Institutional support: RVO:68378271
Keywords : hot wire * nano-crystalline diamond * active flow control * anemometry
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Impact factor: 1.768, year: 2015

A linear array of microscale thermal anemometers has been designed, fabricated and characterized. The sensitive element consists of a self-compensated-stress multilayer (Ni/W) patterned to form a wire with length, width, and thickness close to 200 mu m, 5 mu m and 2 mu m respectively. The wire is deposited and supported by prongs made of nano-crystalline diamond (NCD) of about 2 mu m in thickness. Due to its high Young's modulus, NCD allows a very high mechanical toughness without the need for thicker support for the hot wire. Also, depending on grain size, the NCD is able to present thermal conductivity smaller than 10 W mK(-1), providing good thermal insulation from the substrate and less conductive end losses to the prongs. The sensor was characterized experimentally. Its electrical and thermal properties were obtained first in the absence of fluid flow. The results confirm the effectiveness of thermal insulation and the mechanical robustness of the structure

Permanent Link: http://hdl.handle.net/11104/0281253