Supersensitive surface imaging with very slow secondary electrons

0482727 - ÚPT 2018 KR eng A - Abstract
Mikmeková, Šárka - Konvalina, Ivo - Tsukiori, D. - Arai, R. - Takano, M. - Okuda, K. - Müllerová, Ilona - Frank, Luděk
Supersensitive surface imaging with very slow secondary electrons.
The 3rd East-Asia Microscopy Conference. Abstract Proceeding. Seoul: Korean Society of Microscopy, 2017.
[East-Asia Microscopy Conference /3./. 07.11.2017-10.11.2017, Busan]
Institutional support: RVO:68081731
Keywords : supersensitive surface * very slow secondary electrons
OECD category: Materials engineering

Secondary electron (SE) imaging is one of the most commonly used mode in a scanning electron microscope (SEM). Recently, the modern SEMs are equipped with highly sophisticated multiple detection systems, which enable sharing of the SEs by two or even three detectors. The SEs become effectively separated based on their initial kinetic energy and emission angle. The filtered SE images give additional information of the specimen and its surface. Figure 1 shows the SE micrographs simultaneously collected by two in-column detectors and a conventional out-lens detector. Obviously, the images collected by the in-column detectors exhibit sensitivity on surface potential as a consequence of the low kinetic energy SEs detection. The out-lens image (SE2) shows the topographic contrast, which is carried by the high energy SEs.
Permanent Link: http://hdl.handle.net/11104/0278110