Importance of layer thermal conductivity on the sharpness of patterns produced by laser interference

0474074 - FZÚ 2018 RIV NL eng J - Journal Article
Peláez, R.J. - Afonso, C.N. - Škereň, M. - Bulíř, Jiří
Importance of layer thermal conductivity on the sharpness of patterns produced by laser interference.
Applied Surface Science. Roč. 374, Jun (2016), s. 61-64. ISSN 0169-4332. E-ISSN 1873-5584
Institutional support: RVO:68378271
Keywords : dewetting * laser interference * metal layers * nanoparticles * thermal conductivity
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Impact factor: 3.387, year: 2016

In this work, we compare patterns produced in Ag layers having similar thickness in the range 8.3-10.8 nm but having different initial nanostructure, i.e. behaving either as discontinuous or continuous layers and thus having very different thermal conductivities. The patterns are produced by exposing a phase mask to an excimer laser operating at 193 nm and using a projection optics that leads to similar fringed patterns with periods in the range 6.3-6.7 μm. The layer breaks up into isolated NPs due to laser induced melting at the regions around the intensity maxima sites. The resulting fringes have sharp interfaces in the case of discontinuous layers while a variety of regions across the pattern with no sharp interfaces are produced in the case of continuous layers. The results show that while the temperature distribution across the pattern matches almost perfectly the laser beam intensity profile for the former case, it becomes smeared due to lateral heat flow for the latter case.

Permanent Link: http://hdl.handle.net/11104/0271184