Scanning thermal microscopy of thermoelectric nanostructures

0470064 - FZÚ 2017 RIV US eng J - Journal Article
Vaniš, Jan - Zelinka, Jiří - Zeipl, Radek - Jelínek, Miroslav - Kocourek, Tomáš - Remsa, Jan - Navrátil, Jiří
Scanning thermal microscopy of thermoelectric nanostructures.
Journal of Electronic Materials. Roč. 45, č. 3 (2016), s. 1734-1739. ISSN 0361-5235. E-ISSN 1543-186X
R&D Projects: GA ČR(CZ) GA15-05864S; GA ČR(CZ) GA13-33056S
Institutional support: RVO:68378271 ; RVO:61389013
Keywords : thermoelectric layer * scanning thermal microscopy * pulsed laser deposition * laser deposition * secondary ion mass spectrometry
Subject RIV: BM - Solid Matter Physics ; Magnetism; CA - Inorganic Chemistry (UMCH-V)
Impact factor: 1.579, year: 2016

We present the development and results of a new simple method for thermal conductivity characterization of thin films and thermoelectric structures using a scanning thermal microscope in pulsed current mode. The presented method does not allow measurement of absolute thermal conductivity of the studied system, but only relative to the Si substrate. We present the results of the method on the Si substrate/layer step boundary. The nano-layers of different thickness and different materials were prepared for the experiments by the pulsed laser deposition from hot-pressed targets.
Permanent Link: http://hdl.handle.net/11104/0267800