Quantitative low-energy ion beam characterization by beam profiling and imaging via scintillation screens.

0469204 - ÚFP 2017 RIV US eng J - Journal Article
Germer, S. - Pietag, F. - Polák, Jaroslav - Arnold, T.
Quantitative low-energy ion beam characterization by beam profiling and imaging via scintillation screens.
Review of Scientific Instruments. Roč. 87, č. 11 (2016), č. článku 113301. ISSN 0034-6748. E-ISSN 1089-7623.
[Topical Conference on High-Temperature Plasma Diagnostics/21./. Madison, 05.06.2016-09.06.2016]
Institutional support: RVO:61389021
Keywords : Current density * Etching * Faraday cups * Ion beam sources * Cameras
OECD category: 2.11 Other engineering and technologies
Impact factor: 1.515, year: 2016
http://aip.scitation.org/doi/full/10.1063/1.4964701

This study presents the imaging and characterization of low-current ion beams in the neutralized state monitored via single crystal YAG:Ce (Y3Al5O12) scintillators. To validate the presented beam diagnostic tool, Faraday cup measurements and test etchings were performed. Argon ions with a typical energy of 1.0 keV were emitted from an inductively coupled radio-frequency (13.56 MHz) ion beam source with total currents of some mA. Different beam properties, such as, lateral ion current density, beam divergence angle, and current density in pulsed ion beams have been studied to obtain information about the spatial beam profile and the material removal rate distribution. We observed excellent imaging properties with the scintillation screen and achieved a detailed characterization of the neutralized ion beam. A strong correlation between the scintillator light output, the ion current density, and the material removal rate could be observed.
Permanent Link: http://hdl.handle.net/11104/0267029