GAGG:ce single crystalline films: New perspective scintillators for electron detection in SEM

0465030 - ÚPT 2017 RIV NL eng J - Journal Article
Bok, Jan - Lalinský, Ondřej - Hanuš, M. - Onderišinová, Z. - Kelar, J. - Kučera, M.
GAGG:ce single crystalline films: New perspective scintillators for electron detection in SEM.
Ultramicroscopy. Roč. 163, APR (2016), s. 1-5. ISSN 0304-3991. E-ISSN 1879-2723
R&D Projects: GA ČR(CZ) GA14-20012S; GA ČR(CZ) GA16-05631S; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : scintillator * GAGG:Ce * multicomponent garnet * epitaxial film * electron detection * SEM
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 2.843, year: 2016

Single crystal scintillators are frequently used for electron detection in scanning electron microscopy (SEM). We report gadolinium aluminum gallium garnet (GAGG:Ce) single crystalline films as a new perspective scintillators for the SEM. For the first time, the epitaxial garnet films were used in a practical application: the GAGG:Ce scintillator was incorporated into a SEM scintillation electron detector and it showed improved image quality. In order to prove the GAGG:Ce quality accurately, the scintillation properties were examined using electron beam excitation and compared with frequently used scintillators in the SEM. The results demonstrate excellent emission efficiency of the GAGG:Ce single crystalline films together with their very fast scintillation decay useful for demanding SEM applications.
Permanent Link: http://hdl.handle.net/11104/0263732