Scanning very low energy electron microscopy for the characterization of polycrystalline metal samples

0460209 - ÚPT 2017 RIV CZ eng C - Conference Paper (international conference)
Pokorná, Zuzana - Knápek, Alexandr
Scanning very low energy electron microscopy for the characterization of polycrystalline metal samples.
Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments CAS, 2016 - (Mika, F.), s. 48-49. ISBN 978-80-87441-17-6.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /15./. Skalský dvůr (CZ), 29.05.2016-03.06.2016]
Institutional support: RVO:68081731
Keywords : electron microscopy * SEM * crystallographic orientation
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
http://www.trends.isibrno.cz/

We explored the possibility of a Scanning Electron Microscopy technique for the determination of crystallographic orientation, based on the measurement of the reflectivity of very low energy electrons. Our experiments are based on the concept that in the incident electron energy range 0–30 eV, electron reflectivity can be correlated with the electronic structure of the material, which varies with the local crystallographic orientation of the specimen.
The motivation for the development of this technique was to achieve a quick and highresolution means for determining the crystallographic orientation of very small grains in a polycrystalline material. The key limiting factor was the cleanliness of the sample surface and also the geometrical setup of the experiment.
Permanent Link: http://hdl.handle.net/11104/0260341