0460206 - ÚPT 2017 RIV CZ eng C - Conference Paper (international conference)
Müllerová, Ilona - Mikmeková, Eliška - Konvalina, Ivo - Frank, Luděk
Scanning transmission microscopy at very low energies.
Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments CAS, 2016 - (Mika, F.), s. 40-41. ISBN 978-80-87441-17-6.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /15./. Skalský dvůr (CZ), 29.05.2016-03.06.2016]
R&D Projects: GA TA ČR(CZ) TE01020118; GA MŠMT(CZ) LO1212
Institutional support: RVO:68081731
Keywords : electron microscopy * SEM
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
http://www.trends.isibrno.cz/

To operate down to units of eV with a small primary spot size, a cathode lens with a biased specimen was introduced into the SEM. The reflected signal, accelerated secondary and backscattered electrons, is collected by detectors situated above the specimen.
When we insert a detector below the specimen, the transmitted electron signal can also be used for imaging down to zero energy. Fig. 1 also shows an example of the simulated signal trajectories of electrons that impact on the detector of reflected electrons, based on an Yttrium Aluminium Garnet (YAG) crystal, and trajectories of electrons transmitted through the specimen and incident on a semiconductor detector based on the PIN structure.
Permanent Link: http://hdl.handle.net/11104/0260338