Computer simulation of RBS spectra from samples with surface roughness

0459132 - ÚJF 2017 RIV NL eng J - Journal Article
Malinský, Petr - Hnatowicz, Vladimír - Macková, Anna
Computer simulation of RBS spectra from samples with surface roughness.
Nuclear Instruments & Methods in Physics Research Section B. Roč. 371, MAR (2016), s. 101-105. ISSN 0168-583X. E-ISSN 1872-9584.
[22nd International conference on Ion Beam Analysis (IBA). Opatija, 14.06.2015-19.06.2015]
R&D Projects: GA MŠMT(CZ) LM2011019; GA ČR GA15-01602S
Institutional support: RVO:61389005
Keywords : computer simulation * Rutherford backscattering * surface roughness
Subject RIV: BG - Nuclear, Atomic and Molecular Physics, Colliders
Impact factor: 1.109, year: 2016

A fast code for the simulation of common RBS spectra including surface roughness effects has been written and tested on virtual samples comprising either a rough layer deposited on a smooth substrate or smooth layer deposited on a rough substrate and simulated at different geometries. The sample surface or interface relief has been described by a polyline and the simulated RBS spectrum has been obtained as the sum of many particular spectra from randomly chosen particle trajectories. The code includes several procedures generating virtual samples with random and regular (periodical) roughness. The shape of the RBS spectra has been found to change strongly with increasing sample roughness and an increasing angle of the incoming ion beam.
Permanent Link: http://hdl.handle.net/11104/0259374