Calibration of windowless photodiode for extreme ultraviolet pulse energy measurement

0456145 - ÚFP 2016 RIV US eng J - Journal Article
Koláček, Karel - Schmidt, Jiří - Štraus, Jaroslav - Frolov, Oleksandr
Calibration of windowless photodiode for extreme ultraviolet pulse energy measurement.
Applied Optics. Roč. 54, č. 35 (2015), s. 10454-10459. ISSN 1559-128X. E-ISSN 2155-3165
R&D Projects: GA MŠMT(CZ) LG13029
Institutional support: RVO:61389021
Keywords : Photodetectors * Soft-X-ray * Extreme ultraviolet * Detection * Filters * Metrology
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 1.598, year: 2015

For energy measurement of extreme ultraviolet pulses, no universal commercially available device is available. Therefore, a co-axial setup of a vacuum photodiode was developed and tested. First its unsuccessful calibration at the National Institute of Standards and Technology (USA) is mentioned. Then our own single-wavelength (46.9 nm) calibration procedure is described in detail. It is based on tabulated photoemission efficiency and on measured (1) anode collection efficiency, (2) attenuation of Al filters, and (3) attenuation of measuring cables. Some other relevant attenuating factors are also taken into account.
Permanent Link: http://hdl.handle.net/11104/0256711