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Wave Optical Calculation of Probe Size in Low Energy Scanning Electron Microscope
- 1.0451582 - ÚPT 2016 RIV US eng J - Journal Article
Radlička, Tomáš
Wave Optical Calculation of Probe Size in Low Energy Scanning Electron Microscope.
Microscopy and Microanalysis. Roč. 21, S4 (2015), s. 212-217. ISSN 1431-9276. E-ISSN 1435-8115
R&D Projects: GA MŠMT(CZ) LO1212
Institutional support: RVO:68081731
Keywords : scanning electron microscope * optical calculation
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 1.730, year: 2015
A wave optical calculation of the probe size of a low energy scanning electron microscope is presented. The resolution for the optimal aperture was computed and compared with results of standard approaches. The effect of deflection aberrations is also considered, and it was found to be critical for the landing energies below 5eV and fields of view larger than 100 x 100 pím2.
Permanent Link: http://hdl.handle.net/11104/0252721
Number of the records: 1