Nanopositioning with detection of a standing wave

0451092 - FZÚ 2020 RIV CZ eng C - Conference Paper (international conference)
Holá, M. - Hrabina, J. - Číp, O. - Fejfar, Antonín - Stuchlík, Jiří - Kočka, Jan - Oulehla, J. - Lazar, J.
Nanopositioning with detection of a standing wave.
NANOCON 2013. 5th International conference proceedings. Ostrava: TANGER Ltd, 2014, s. 792-796. ISBN 978-80-87294-47-5.
[NANOCON 2013. International Conference /5./. Brno (CZ), 16.10.2013-18.10.2013]
R&D Projects: GA MŠMT(CZ) LM2011026
Institutional support: RVO:68378271
Keywords : nanometrology * nanopositioning * Fabry-Perot cavity * standing wave * interferometry
OECD category: Optics (including laser optics and quantum optics)

A measuring technique is intended for displacement and position sensing over a limited range with detection of standing-wave pattern inside of a passive Fabry-Perot cavity. In this concept we consider locking of the laser optical frequency and the length of the Fabry-Perot cavity in resonance. Fixing the length of the cavity to e.g. a highly stable mechanical reference allows stabilizing wavelength of the laser in air and thus to eliminate especially the faster fluctuations of refractive index of air due to air flow and inhomogeneity. Detection of the interference maxima and minima within the Fabry-Perot cavity along the beam axis has been tested and proven with a low loss transparent photodetector with very low reflectivity. The transparent photodetector is based on a thin polycrystalline silicon layer. Reduction of losses was achieved thanks to a design as an optimized set of interference layers acting as an antireflection coating. The principle is demonstrated on an experimental setup.
Permanent Link: http://hdl.handle.net/11104/0252273