Reactive Laser-induced Ablation as Approach to Titanium Oxycarbide Films

0447486 - ÚCHP 2016 RIV CH eng J - Journal Article
Jandová, Věra - Fajgar, Radek - Dytrych, Pavel - Koštejn, Martin - Dřínek, Vladislav - Kupčík, Jaroslav
Reactive Laser-induced Ablation as Approach to Titanium Oxycarbide Films.
Thin Solid Films. Roč. 590, SEP 1 (2015), s. 270-275. ISSN 0040-6090. E-ISSN 1879-2731
Institutional support: RVO:67985858
Keywords : IR laser * reactive ablation * titanium ethoxide
Subject RIV: CF - Physical ; Theoretical Chemistry
Impact factor: 1.761, year: 2015

The IR laser-induced reactive ablation of frozen titanium ethoxide target was studied. The method involves the laser ablation of titanium ethoxide at −140 °C in gaseous methane (4–50 Pa) atmosphere. This process leads to reactions of the ablative species with hydrocarbon in the gaseous phase. During the ablation of the frozen target excited species interact with methane molecules. The reactive ablation process leads to the formation of a smooth thin film. The thickness of prepared films depends on the number of IR pulses and their composition depends on the pressure of gaseous methane. This reactive IR ablation proceeds as a carbidation process providing nanostructured films with good adhesion to various substrates (glass, metals, KBr) depending on the carbon content in prepared films. Particles are also stabilized by layer preventing their surface oxidation in the atmosphere. The described results are important in the general context for the synthesis of reactive particles in the gas phase. The final products are characterized by spectroscopic, microscopic and diffraction techniques: SEM/EDX, HRTEM, electron diffraction, Raman spectroscopy and XPS.
Permanent Link: http://hdl.handle.net/11104/0249854