Imaging of dopant distribution in optical fibers with an orthogonal TOF SIMS

0442464 - ÚFE 2015 RIV GB eng J - Journal Article
Lorinčík, Jan - Kašík, Ivan - Vaniš, Jan - Sedláček, L. - Dluhoš, J.
Imaging of dopant distribution in optical fibers with an orthogonal TOF SIMS.
Surface and Interface Analysis. Roč. 46, č. 1 (2014), s. 238-240. ISSN 0142-2421. E-ISSN 1096-9918.
[19th International Conference on Secondary Ion Mass Spectrometry (SIMS). Jeju, 29.09.2013-04.10.2013]
Grant - others:GA AV ČR(CZ) M100761202
Institutional support: RVO:67985882
Keywords : TOF SIMS * Optical fibers * Dopant
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 1.245, year: 2014

The analysis of doping element distribution in optical fiber cross sections requires a sensitive high spatial resolution technique. We demonstrate that a compact orthogonal Time-of-Flight (TOF) mass spectrometer attached to a multitechnique FIB-SEM-EDX system can be used to analyze cross sections of as manufactured optical fibers. By performing quantitative Energy Dispersive X-Ray (EDX) analysis of the optical preform, from which the fibers were drawn, we obtained conversion factors, which enabled the quantification of the Focused Ion Beam(FIB) SIMS profiles of the fiber cross sections
Permanent Link: http://hdl.handle.net/11104/0245274