Periodic nanostructures self-formed on silicon and silicon carbide by femtosecond laser irradiation

0441107 - FZÚ 2015 RIV DE eng J - Journal Article
Gemini, Laura - Hashida, M. - Shimizu, M. - Miyasaka, Y. - Inoue, S. - Tokita, S. - Limpouch, J. - Mocek, Tomáš - Sakabe, S.
Periodic nanostructures self-formed on silicon and silicon carbide by femtosecond laser irradiation.
Applied Physics A - Materials Science & Processing. Roč. 117, č. 1 (2014), s. 49-54. ISSN 0947-8396. E-ISSN 1432-0630
R&D Projects: GA MŠMT ED2.1.00/01.0027; GA MŠMT EE2.3.20.0143; GA MŠMT(CZ) LG13029
Grant - others:HILASE(XE) CZ.1.05/2.1.00/01.0027; OP VK 6(XE) CZ.1.07/2.3.00/20.0143
Institutional support: RVO:68378271
Keywords : coulomb explosion * ablation * surfaces * metals * pulses * semiconductors * fabrication * thresholds * picosecond
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 1.704, year: 2014

Laser-induced periodic surface structures (LIPSS) were formed on Si and SiC surfaces by irradiations with femtosecond laser pulses in air. Different kinds of self-organized structures appeared on Si and SiC at laser fluences slightly higher than the damage threshold, which was measured by confocal laser scanning microscope. Thecharacteristic spatial periodicity of every observed structure was estimated reading the peak values of the 2D Fourier transform power spectra obtained from SEM images. The evolution of the spatial periodicity was finally tudied with respect to both the laser fluence and the number of laser pulses.
Permanent Link: http://hdl.handle.net/11104/0244153