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The effect of grain and pore sizes on the mechanical behavior of thin Al films deposited under different conditions
- 1.0440919 - ÚT 2016 RIV GB eng J - Journal Article
Ben-David, E. - Landa, Michal - Janovská, Michaela - Seiner, Hanuš - Gutman, O. - Tepper-Faran, T. - Shilo, D.
The effect of grain and pore sizes on the mechanical behavior of thin Al films deposited under different conditions.
Acta Materialia. Roč. 87, April (2015), s. 321-331. ISSN 1359-6454. E-ISSN 1873-2453
Grant - others:Rada Programu interní podpory projektů mezinárodní spolupráce AV ČR(CZ) M100761203
Program: M
Institutional support: RVO:61388998
Keywords : thin films * mechanical properties * tensile tests * bulge tests * porosity
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 5.058, year: 2015
http://www.sciencedirect.com/science/article/pii/S1359645414009677
This paper presents a comprehensive study of the relationships between deposition conditions, microstructure and mechanical behavior in thin aluminum films commonly used in micro and nano-devices. A particular focus is placed on the effect of porosity, which is present in all thin films deposited by evaporation or sputtering techniques.
Permanent Link: http://hdl.handle.net/11104/0244040
Number of the records: 1