Etching of glass microchips with supercritical water

0434366 - ÚIACH 2015 RIV GB eng J - Journal Article
Karásek, Pavel - Grym, Jakub - Roth, Michal - Planeta, Josef - Foret, František
Etching of glass microchips with supercritical water.
Lab on a Chip. Roč. 15, č. 1 (2015), s. 311-318. ISSN 1473-0197. E-ISSN 1473-0189
R&D Projects: GA ČR(CZ) GAP106/12/0522; GA ČR(CZ) GBP206/12/G014; GA MŠMT(CZ) EE2.3.20.0182
Institutional support: RVO:68081715
Keywords : glass microchips * channel etching * supercritical water
Subject RIV: CB - Analytical Chemistry, Separation
Impact factor: 5.586, year: 2015

A novel method of etching channels in glass microchips with the most tunable solvent, water, was tested as an alternative to common hydrogen fluoride-containing etchants.
Permanent Link: http://hdl.handle.net/11104/0238435