Measurement of current density distribution in shaped e-beam writers

0434105 - ÚPT 2015 RIV CZ eng C - Conference Paper (international conference)
Horáček, Miroslav - Bok, Jan - Kolařík, Vladimír - Urbánek, Michal - Matějka, Milan - Krátký, Stanislav
Measurement of current density distribution in shaped e-beam writers.
18th International Microscopy Congres. Proceedings. Praha: Czechoslovak Microscopy Society, 2014. ISBN 978-80-260-6720-7.
[International Microscopy Congres /18./. Praha (CZ), 07.09.2014-12.09.2014]
R&D Projects: GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01; GA TA ČR TE01020118
Institutional support: RVO:68081731
Keywords : e-beam writer * current density
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

The ZrO W(100) Schottky cathode is used in our e-beam writing system working with a rectangular-shaped electron beam. The homogeneous angular current density distribution is crucial for quality of exposures of the shaped beam lithography systems. Two basic types of the angular emission distribution can be observed in dependence on the microscopic final end form shape of the emitter tip, with bright centre and more common dark centre. The stable operation of the cathode thus stable end form shape requires a delicate balance of parameters inside the gun which however can slightly change during cathode life time. This implies the necessity of analysing and periodical monitoring the current density distribution in e-beam. Four methods enabling this measurement are presented.
Permanent Link: http://hdl.handle.net/11104/0238240