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Growth of carbon allotropes and plasma characterization in linear antenna microwave plasma CVD system
- 1.0432261 - FZÚ 2015 RIV JP eng J - Journal Article
Potocký, Štěpán - Babchenko, Oleg - Davydova, Marina - Ižák, Tibor - Čada, Martin - Kromka, Alexander
Growth of carbon allotropes and plasma characterization in linear antenna microwave plasma CVD system.
Japanese Journal of Applied Physics. Roč. 53, č. 5 (2014), "05FP04-1"-"05FP04-3". ISSN 0021-4922. E-ISSN 1347-4065
R&D Projects: GA TA ČR TA01011740; GA ČR GAP205/12/0908
Grant - others:AVČR(CZ) M100100902
Institutional support: RVO:68378271
Keywords : antenna linear * CVD system * plasma
Subject RIV: BL - Plasma and Gas Discharge Physics
Impact factor: 1.127, year: 2014
Growth of diamond coatings with tunable morphology and concurrent substrate catalyst pretreatment and further growth of carbon nanotubes were studied. The dependence of plasma parameters on gas composition was studied by Langmuir probe measurement. Grown diamond coatings and carbon nanotubes were characterized by scanning electron microscopy and Raman spectroscopy and correlated with process parameters. Well-defined nanocrystalline, polycrystalline, and porous diamond films were prepared. Concurrent substrate catalyst pretreatment and further growth of carbon nanotubes were shown.
Permanent Link: http://hdl.handle.net/11104/0236689
Number of the records: 1