Fabrication of diamond based quartz crystal microbalance gas sensor

0432192 - FZÚ 2015 RIV CH eng C - Conference Paper (international conference)
Varga, Marián - Laposa, A. - Kulha, P. - Davydova, Marina - Kroutil, J. - Husák, M. - Kromka, Alexander
Fabrication of diamond based quartz crystal microbalance gas sensor.
Key Engineering Materials : Materials and Applications for Sensors and Transducers III. Vol. 605. Zurich: Trans Tech Publications, 2014 - (Hristoforou, E.; Vlachos, D.), s. 589-592. ISBN 9783038350514. ISSN 1013-9826.
[International Conference on Materials and Applications for Sensors and Transducers /3./ (IC-MAST 2013). Praha (CZ), 13.09.2013-17.09.2013]
R&D Projects: GA ČR(CZ) GAP108/11/0794
Institutional support: RVO:68378271
Keywords : diamond thin film * low temperature deposition * quartz crystal microbalance * gas sensor
Subject RIV: JB - Sensors, Measurment, Regulation

Synthetic diamond has remarkable properties comparable with natural diamond and hence is a very promising material for many various applications. Nowadays, deposition of diamond films is normally employed in chemical vapor deposition (CVD) usually at high temperatures, what limit its application to high melting substrates. Gravimetric (mass) sensors belong to the major categories of chemical sensors and the most common type of mass sensor is the bulk acoustic quartz crystal microbalance (QCM). This contribution deals with a NCD growth from the H2/CH4/CO2 gas mixture at low temperature (400 °C) by pulsed linear antenna MWCVD plasma system on 10 MHz circular AT-cut quartz resonators substrate. Gas sensor based on the NCD-coated QCM was developed for detection of ammonia at room temperature. Measurements not only confirmed the functionality of this first published NCD-coated QCM sensor, but in addition its sensitivity was twofold to a virgin QCM sensor with a gold active layer.
Permanent Link: http://hdl.handle.net/11104/0236647