Performances of microwave plasma generation in linear antenna configuration

0424334 - FZÚ 2014 RIV SK eng C - Conference Paper (international conference)
Potocký, Štěpán - Rezek, Ondřej - Čada, Martin - Babchenko, Oleg - Ižák, Tibor - Varga, Marián - Kromka, Alexander
Performances of microwave plasma generation in linear antenna configuration.
Perspektívne vákuové metódy a technológie (Perspective vacuum methods and technologies). Bratislava: Slovenská vákuová spoločnosť, 2013 - (Vojs, M.; Veselý, M.; Vincze, A.), s. 42-46. ISBN 978-80-971179-2-4.
[School of Vacuum Technology /16./ (Perspektívne vákuové metódy a technológie. Perspective vacuum methods and technologies). Štrbské Pleso (SK), 10.10.2013-13.10.2013]
R&D Projects: GA TA ČR TA01011740; GA ČR GAP205/12/0908
Institutional support: RVO:68378271
Keywords : microwave plasma * linear antena * CVD deposition
Subject RIV: BL - Plasma and Gas Discharge Physics

The versatility of linear antenna MW plasma system for growth of carbon allotropes was previously shown. Utilization of commercially available deposition systems brings advantages of strong technological background, cost effectiveness and usually easy further up-scaling. On the other hand, these systems need special modifications and deeper understanding of ongoing processes when used for scientific research. In this article we studied the behavior of plasma generation by two independent pulsed MW generators. We have shown how to overcome a problem of missing trigger outputs from the pulsed MW generators for realization of time resolved measurements. We have also shown that in the studied system exist the 33 min period during which originally synchronized pulses detune each from other and synchronize back creating also an interval of time when plasma does not extinguish.
Permanent Link: http://hdl.handle.net/11104/0230415