Perspectives of linear antenna microwave system for growth of various carbon nano-forms and its plasma study

0422223 - FZÚ 2014 RIV DE eng J - Journal Article
Potocký, Štěpán - Čada, Martin - Babchenko, Oleg - Ižák, Tibor - Davydova, Marina - Kromka, Alexander
Perspectives of linear antenna microwave system for growth of various carbon nano-forms and its plasma study.
Physica Status Solidi B. Roč. 250, č. 12 (2013), 2723–2726. ISSN 0370-1972. E-ISSN 1521-3951
R&D Projects: GA TA ČR TA01011740; GA ČR GAP205/12/0908
Institutional support: RVO:68378271
Keywords : CNT * Langmuir probe * nanocrystalline diamond * plasma enhanced CVD * Raman spectroscopy * SEM
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.605, year: 2013

The versatility of linear antenna microwave plasma system, growth of diamond films with variable grain sizes, and efficient synthesis of oriented carbon nanotubes when combined with radiofrequency substrate bias were studied. Grown diamond films and carbon nanotubes are characterized by Raman spectroscopy and scanning electron microscopy. Successful surface functionalization of carbon nanotubes without their destruction is shown in agreement to plasma state as measured by Langmuir probe. We show that diamond growth from large to ultra-small size grains can be easily driven by total gas pressure. Langmuir probe measurements indicate low electron effective energy at substrate position and higher ion energy at the lowest total gas pressure.
Permanent Link: http://hdl.handle.net/11104/0228392