Collection of signal electrons in Low Energy SEM

0420975 - ÚPT 2014 DE eng C - Conference Paper (international conference)
Konvalina, Ivo - Müllerová, Ilona
Collection of signal electrons in Low Energy SEM.
Microscopy conference (MC) 2013. Proceedings. Vol. 2. Regensburg: University of Regensburg, 2013, s. 327-328.
[Microscopy Conference 2013. Regensburg (DE), 25.08.2013-30. 08.2013]
R&D Projects: GA MŠMT EE2.4.31.0016
Institutional support: RVO:68081731
Keywords : signal collection * low energy SEM * trajectory simulations
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Modern scanning electron microscopes (SEM) are equipped with a field emission gun and the specimen is usually immersed in a strong magnetic field in order to reach high resolution. Low energy SEM equipped by a beam deceleration system, e.g. cathode lens (CL), can obtain spot size below 10 nm for landing energy of units of eV. Low energy SEM with a cathode lens has to be combined with a focusing lens. Magnetic or immersion-magnetic focusing lenses (with weak or strong magnetic field in the specimen plane, respectively) are used in our simulations. These two alternatives are compared with regard to their influence on signal electrons.
Permanent Link: http://hdl.handle.net/11104/0227433