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Modified knife-edge method for current density distribution measurements in e-beam writers
- 1.0397634 - ÚPT 2014 RIV US eng J - Journal Article
Bok, Jan - Kolařík, Vladimír - Horáček, Miroslav - Matějka, Milan - Matějka, František
Modified knife-edge method for current density distribution measurements in e-beam writers.
Journal of Vacuum Science & Technology B. Roč. 31, č. 3 (2013), 031603:1-6. ISSN 1071-1023
R&D Projects: GA MŠMT ED0017/01/01; GA TA ČR TE01020118
Institutional support: RVO:68081731
Keywords : electron-beam * intensity distribution * aperture * detector * profile * size
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 1.358, year: 2013
In this paper, the authors present a modified knife-edge method for two-dimensional current density mapping in electron-beam writing systems. This method is applicable in rectangular and in variable-shaped e-beam writers with a fixed mutual position of the e-beam and the 1st shutter during exposure. In contrast to other methods, the modified knife-edge method uses only native parts of the e-beam writer, giving it the advantage of easy implementation. The measurement error of our method is analyzed and the trade-off between the result accuracy, the current density resolution and the measurement duration is discussed. The presented method is demonstrated by adjusting an electron emitter in order to select a homogeneous e-beam pattern.
Permanent Link: http://hdl.handle.net/11104/0225249
Number of the records: 1