- Observation of high stressed hydrogenated carbon nitride films by SLE…
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Observation of high stressed hydrogenated carbon nitride films by SLEEM

  1. 1.
    0386392 - ÚPT 2013 RIV CZ eng C - Conference Paper (international conference)
    Mikmeková, Eliška - Müllerová, Ilona - Sobota, Jaroslav
    Observation of high stressed hydrogenated carbon nitride films by SLEEM.
    Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2012 - (Mika, F.), s. 43-44. ISBN 978-80-87441-07-7.
    [International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./. Skalský dvůr (CZ), 25.06.2012-29.06.2012]
    Institutional support: RVO:68081731
    Keywords : SLEEM * hydrogenated carbon nitride films
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
    Permanent Link: http://hdl.handle.net/11104/0215692
     
Number of the records: 1  

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