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Voice coil based scanning probe microscopy

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    0385209 - ÚPT 2013 RIV US eng J - Journal Article
    Klapetek, P. - Valtr, M. - Duchoň, V. - Sobota, Jaroslav
    Voice coil based scanning probe microscopy.
    Nanoscale Research Letters. Roč. 7, č. 6 (2012), 332:1-7. ISSN 1931-7573. E-ISSN 1556-276X
    R&D Projects: GA MPO FR-TI1/241; GA AV ČR KAN311610701; GA MŠMT ED0017/01/01
    Institutional support: RVO:68081731
    Keywords : SPM * Voice coil * Interferometry
    Subject RIV: BM - Solid Matter Physics ; Magnetism
    Impact factor: 2.524, year: 2012

    We present a novel system for large-area scanning probe microscopy (SPM) measurements based on minimum counter-force linear guidance mechanisms, voice coils, interferometers and fuzzy logic-based feedback loop electronics. It is shown that voice coil-based actuation combined with interferometry can be a good alternative to piezoceramic positioning systems, providing fast and still sufficient, precise displacements which range from nanometers to millimeters. Using fuzzy logic feedback control, it can be actuated even with only a few low-cost components, like a cheap single-chip microcontroller. As the final positioning resolution can be made independent on the electronics output resolution, the system can reach high positioning resolution even on very large scan sizes. This is a key prerequisite for developing novel generations of SPMs that would combine, in a very large range, with high-speed imaging.
    Permanent Link: http://hdl.handle.net/11104/0214542

     
     
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