Pulsed linear antenna microwave plasma – a step ahead in large area material depositions and surface functionalization

0374830 - FZÚ 2012 RIV CZ eng C - Conference Paper (international conference)
Kromka, Alexander - Babchenko, Oleg - Ižák, Tibor - Potocký, Štěpán - Davydova, Marina - Neykova, Neda - Kozak, Halyna - Remeš, Zdeněk - Hruška, Karel - Rezek, Bohuslav
Pulsed linear antenna microwave plasma – a step ahead in large area material depositions and surface functionalization.
NANOCON 2011. Conference proceedings. Ostrava: Tanger Ltd, 2011, s. 271-279. ISBN 978-80-87294-27-7.
[NANOCON 2011. International Conference /3./. Brno (CZ), 21.09.2011-23.09.2011]
R&D Projects: GA ČR(CZ) GAP108/11/0794; GA MŠMT(CZ) MEB0810082; GA AV ČR KAN400100701; GA AV ČR(CZ) IAAX00100902
Institutional research plan: CEZ:AV0Z10100521
Keywords : microwave plasma * CVD deposition * diamond * CNT * graphene
Subject RIV: BM - Solid Matter Physics ; Magnetism

A technological progress in the large area growth of diamond films and carbon nanotubes by the modified linear antenna MW system is presented. We show a correlation between process parameters and nano- or poly-crystalline film character. A challenging part, diamond coated mirrors or ATR prisms, are shown as multifunctional optical elements suitable for detection of absorbed molecules. Additional positive feature of the presented plasma system is low temperature hydrogen functionalization of diamond films. Finally, we present that combination of pulsed MW plasma with radiofrequency substrate biasing results in growth of oriented CNTs over large area.
Permanent Link: http://hdl.handle.net/11104/0207655