Mechanical properties of Al thin film measured by two different methods

0368997 - ÚFM 2012 RIV SK eng J - Journal Article
Kuběna, Ivo - Kruml, Tomáš
Mechanical properties of Al thin film measured by two different methods.
Acta Metallurgica Slovaca. - (Longauerová, M.). Roč. 17, č. 3 (2011), s. 163-168. ISSN 1338-1156
Institutional research plan: CEZ:AV0Z20410507
Keywords : thin films * focused ion beam * aluminium * nanoindentation
Subject RIV: JJ - Other Materials

Mechanical properties of an aluminium thin film were measured by microcompression and indentation tests. The microcompression technique combines preparation of specimens using focused ion beam (FIB) and compression test by a nanoindeter device. Cylindrical specimens were prepared by focused ion beam milling. The height of cylindrical specimens was about 2 micrometers and their diameter about 1,3 micrometers. The load and displacement were continuously measured during tests. The stress-strain curves were obtained in two representations. Stresses of the first plastic bursts were determined in both representations. Hardness and Young modulus were measured by indentation test using continuous stiffness method. Representative values of thin film were calculated
Permanent Link: http://hdl.handle.net/11104/0203178