Detection of Secondary Electrons by Scintillation Detector at VP SEM

0368932 - ÚPT 2012 RIV US eng J - Journal Article
Jirák, J. - Čudek, P. - Neděla, Vilém
Detection of Secondary Electrons by Scintillation Detector at VP SEM.
Microscopy and Microanalysis. Roč. 17, Suppl. 2 (2011), s. 922-923. ISSN 1431-9276. E-ISSN 1435-8115
R&D Projects: GA ČR GAP102/10/1410
Institutional research plan: CEZ:AV0Z20650511
Keywords : variable pressure scanning electron microscopes (VP-SEM) * scintillation detector * secondary electrons
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 3.007, year: 2011

For specimen observation in the scanning electron microscope operating at a higher pressure of gases in the specimen chamber (VP SEM) ionization and scintillation detectors are commonly used. The ionization detector detects a mixture of signals of secondary and backscattered electrons. Detection of predominantly secondary electrons is possible due to a special detector construction.
Permanent Link: http://hdl.handle.net/11104/0203133