Simulation of Energy Selective signal Amplification in Gas Environment of Variable Pressure SEM

0368930 - ÚPT 2012 RIV US eng J - Journal Article
Neděla, Vilém - Konvalina, Ivo - Lencová, B. - Zlámal, J.
Simulation of Energy Selective signal Amplification in Gas Environment of Variable Pressure SEM.
Microscopy and Microanalysis. Roč. 17, Suppl. 2 (2011), s. 920-921. ISSN 1431-9276. E-ISSN 1435-8115
R&D Projects: GA ČR GAP102/10/1410
Institutional research plan: CEZ:AV0Z20650511
Keywords : variable pressure scanning electron microscopes (VP-SEM) * AQUASEM II * simlulation
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 3.007, year: 2011

High pressure of gas mostly water vapour, with pressure range from 0.1 Pa to 80 Pa in the first differentially pumped chamber and 10 Pa to over 2000 Pa in the specimen chamber is used in variable pressure scanning electron microscopes (VP-SEM) such as our experimental AQUASEM II equipped with a combined YAG-BSE and ionization detector of SE. The gas environment causes unwanted primary electron beam diffusion, but it also supports gas ionization cascade amplification of the signal of secondary electrons (SE), accelerated by the applied field of detection electrode of the ionisation detector.
Permanent Link: http://hdl.handle.net/11104/0203132