Thermal Desorption Spectroscopy Study on Diamond-like Carbon Films Modified by Silicon, Oxygen or Nitrogen

0368783 - ÚJF 2013 RIV SK eng C - Conference Paper (international conference)
Bursíková, V. - Sťahel, P. - Gardelka, T. - Bochnicek, Z. - Peřina, Vratislav - Havránek, Vladimír - Mikšová, Romana
Thermal Desorption Spectroscopy Study on Diamond-like Carbon Films Modified by Silicon, Oxygen or Nitrogen.
SAPP 18th Symposium on Application of Plasma Processes SAPP XVIII. Bratislava: Department of Experimental Physics, Faculty of Mathematics,, 2011 - (Országh, J.; Papp, P.; Matejčík, Š.), pp.347-pp.402. ISBN 978-80-89186-77-8.
[18th Symposium on Application of Plasma Processes and. Vrátna dolina (SK), 15.01.2011-20.01.2011]
R&D Projects: GA ČR GA202/07/1669
Institutional research plan: CEZ:AV0Z10480505
Keywords : Spectroscopy * silicon oxide
Subject RIV: BG - Nuclear, Atomic and Molecular Physics, Colliders

Diamond-like carbon coatings with various silicon-oxide content were deposited on different substrate materials (silicon, glass, polycarbonate and steel) in capacitively coupled r.f. discharge (13.56 MHz). Complete atomic compositions, including hydrogen content and film densities, were determined by combination of RBS and ERD analyses. The complex dielectric function of the films was determined from ellipsometric measurements in the range 1.5-5.2 eV. The mechanical properties of prepared coatings (e.g. hardness, elastic modulus, fracture toughness, coating/substrate adhesion etc.) were studied by means of depth sensing indentation technique using Fischerscope H100 tester. The effect of intrinsic stress on the coating properties was investigated.
Permanent Link: http://hdl.handle.net/11104/0203029