Testing of a Micro Faraday Cup Array for Ion Detection in SIMS

0367803 - ÚFE 2012 RIV US eng J - Journal Article
Lorinčík, Jan - Denton, M. B. - Sperline, R. P. - Young, E. T. - Williams, P.
Testing of a Micro Faraday Cup Array for Ion Detection in SIMS.
Analytical Letters. Roč. 44, č. 6 (2011), s. 1050-1057. ISSN 0003-2719. E-ISSN 1532-236X
R&D Projects: GA MŠMT ME 894
Institutional research plan: CEZ:AV0Z20670512
Keywords : Faraday cup * SIMS * Capacitance transimpedance amplifier * Ion detection
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 1.016, year: 2011

A micro-Faraday array detector (row of miniature 32 thin film strip electrodes wire bonded to an on-chip integrated capacitance transimpedance amplifier) was tested for use in a multiple collector secondary ion mass spectrometry. The detector was mounted on a standard IMS3f SIMS instrument in place of a microchannel plate. The measurements were performed by using a silicon sample bombarded by either [image omitted] or Cs+ primary ions with or without D2O flooding and detecting secondary ions of Si +/-, SiH +/-, O-, SiD-, OD-. A parallel detection of near masses of 29Si and 28SiH or 18O and 16OD was demonstrated at a sensitivity level 230 counts/s.
Permanent Link: http://hdl.handle.net/11104/0202351