Electron optical properties of a focusing magnetic/immersion-magnetic lens combined with a cathode lens

0367278 - ÚPT 2012 RIV DE eng C - Conference Paper (international conference)
Konvalina, Ivo - Hovorka, Miloš - Müllerová, Ilona
Electron optical properties of a focusing magnetic/immersion-magnetic lens combined with a cathode lens.
MC 2011 - Microscopy Conference Kiel. Kiel: DGE, 2011, IM1.112:1-2. ISBN 978-3-00-033910-3.
[MC 2011 - Microscopy Conference. Kiel (DE), 28.08.2011-02.09.2011]
R&D Projects: GA AV ČR IAA100650902; GA MPO FR-TI1/305; GA MPO FR-TI1/118
Institutional research plan: CEZ:AV0Z20650511
Keywords : cathode lens * aberration coefficients * spot size
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

The cathode lens (CL) is an electron optical element used in emission electron microscopes. Special application is in the scanning low energy electron microscope (SLEEM. The CL is using first for retardation of an illuminating electron beam and then for acceleration of reflected as well as secondary electrons. The cathode lens has to be combined with a focusing magnetic lens (sequential fields) or a focusing immersion-magnetic lens (overlapped fields). These two alternatives are compared with regards to their optical properties, in particular with respect to predicted aberration coefficients (CS, CC) and the spot size, the optimum angular aperture of the primary beam, as well as maximum primary beam current for each system.
Permanent Link: http://hdl.handle.net/11104/0202018